Depth Profile Analysis of Plasma-cured Multi Layer Resist

Profile Measurement of Resist Surface Using Multi-Array-Probe System

Semiconductor processing in manufacturing must be fast and highly accurate in the measuring of the surface profile of soft thin films such as photoresist. Since photoresist surface is very smooth and deformable, a device to measure is required that will measure vertical direction with a nanometer resolution in height and not damage the film during the measurement. To do this, we developed an ap...

Multi Layer Analysis

This thesis presents a new methodology to analyze one-dimensional signals trough a new approach called Multi Layer Analysis, for short MLA. It also provides some new insights on the relationship between one-dimensional signals processed by MLA and tree kernels, test of randomness and signal processing techniques. The MLA approach has a wide range of application to the fields of pattern discover...

Availability Analysis of Multi - Layer

An Interactive Hybrid Renderer using Multi-Layer Depth

Current interactive hybrid (combined volume and surface) rendering techniques are only able to embed opaque polygonal objects and therefore cannot provide accurate depth perception of semi-transparent surfaces. This paper proposes a volume rendering approach based on a Multi-Layer Depth Map (MDM) that enables multiple translucent polygons to be embedded. This novel approach generates multiple d...

Shadow Penumbras for Complex Objects by Depth-Dependent Filtering of Multi-Layer Depth Images

This paper presents an efficient algorithm for filtering multi-layer depth images (MDIs) in order to produce approximate penumbras. The filtering is performed on a MDI that represents the view from the light source. The algorithm is based upon both ray tracing and the z-buffer shadow algorithm, and is closely related to convolution methods. The method’s effectiveness is demonstrated on especial...